Table of Contents 1
Cover
3
Preface
5
Part I: Fundamentals of Whole‐Angle Gyroscopes
1 Introduction
1.1 Types of Coriolis Vibratory Gyroscopes
1.2 Generalized CVG Errors
1.3 Overview
2 Dynamics
2.1 Introduction to Whole‐Angle Gyroscopes
2.2 Foucault Pendulum Analogy
2.3 Canonical Variables
2.4 Effect of Structural Imperfections
2.5 Challenges of Whole‐Angle Gyroscopes
3 Control Strategies
3.1 Quadrature and Coriolis Duality
3.2 Rate Gyroscope Mechanization
3.3 Whole‐Angle Mechanization
3.4 Conclusions
6
Part II: 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures
4 Overview of 2‐D Micro‐Machined Whole‐Angle Gyroscopes
4.1 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures
4.2 2‐D Micro‐Machining Processes
5 Example 2‐D Micro‐Machined Whole‐Angle Gyroscopes
5.1 A Distributed Mass MEMS Gyroscope – Toroidal Ring Gyroscope
5.2 A Lumped Mass MEMS Gyroscope – Dual Foucault Pendulum Gyroscope
7
Part III: 3‐D Micro‐Machined Whole‐Angle Gyroscope Architectures
6 Overview of 3‐D Shell Implementations
6.1 Macro‐scale Hemispherical Resonator Gyroscopes
6.2 3‐D Micro‐Shell Fabrication Processes
6.3 Transduction of 3‐D Micro‐Shell Resonators
7 Design and Fabrication of Micro‐glassblown Wineglass Resonators
7.1 Design of Micro‐Glassblown Wineglass Resonators
7.2 An Example Fabrication Process for Micro‐glassblown Wineglass Resonators
7.3 Characterization of Micro‐Glassblown Shells
8 Transduction of Micro‐Glassblown Wineglass Resonators
8.1 Assembled Electrodes
8.2 In‐plane Electrodes
8.3 Fabrication
8.4 Experimental Characterization
8.5 Out‐of‐plane Electrodes
8.6 Design
8.7 Fabrication
8.8 Experimental Characterization
9 Conclusions and Future Trends
9.1 Mechanical Trimming of Structural Imperfections
9.2 Self‐calibration
9.3 Integration and Packaging
9
Index
10
IEEE Press Series on Sensors
List of Tables 1 List of AbbreviationsTable 1 Control system abbreviations.Table 2 Mechanical parameters of the resonator. 2 Chapter 5Table 5.1 Summary of design parameters.Table 5.2 As‐fabricated frequency symmetry of four devices.Table 5.3 Summary of design parameters. 3 Chapter 7Table 7.1 Comparison of wineglass dimensions obtained from analytical solutio...Table 7.2 Anchor loss analysis shows a large change in
4 Chapter 8Table 8.1 Table summarizing frequency splits and center frequency of five dif...Table 8.2 Summary of device parameters for a 7 mm fused silica wineglass reso...
List of Illustrations
1 Chapter 1Figure 1.1 Coriolis Vibratory Gyroscopes, in their simplest form, consist of...Figure 1.2 Micro‐rate integrating gyroscope (MRIG) architectures.Figure 1.3 Sample Allan variance analysis of gyroscope output, showing error...
2 Chapter 2Figure