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Table of Contents
1 Cover
4 Preface
5 1 Metal-Assisted Chemical Etching of Silicon: Origin, Mechanism, and Black Silicon Solar Cell Applications 1.1 Introduction 1.2 History and Mechanism of Metal-Assisted Chemical Etching of Silicon 1.3 Fabrication and Optical Properties of Black Silicon by MacEtch of Silicon 1.4 Photovoltaic Solar Cell Applications of MacEtch Black Silicon 1.5 Concluding Remarks Acknowledgements References
6 2 Alkaline Texturing 2.1 Introduction to Alkaline Texturing 2.2 Pyramid Formation 2.3 Chemical Mixtures Used in the Alkaline Texturing 2.4 Mechanisms of Alkaline Texturing, Important Parameters Involved in Alkaline Texturing 2.5 Surface Conditioning Prior to Alkaline Texturing 2.6 Problems Associated to Alkaline Texturing References
7 3 Advanced Texturing 3.1 Introduction to Advanced Texturing 3.2 History and Definition of Metal-Assisted Chemical Etching 3.3 Mechanisms of Metal-Assisted Chemical Etching 3.4 Methods of Metal-Assisted Chemical Etching 3.5 Copper-Assisted Chemical Etching 3.6 Conclusion References
8 4 Wet Chemical Cleaning for Industrial Application 4.1 Introduction 4.2 Status of Production Technology in Solar Cell Manufacturing 4.3 Wet Chemical Process Technology 4.4 Contamination Management 4.5 Cost Considerations 4.6 Conclusion Acknowledgments References
9 5 Analytical Techniques for Wet Processing 5.1 Introduction 5.2 Metal Analysis by ICP-MS 5.3 Determination of Organic Contaminations Acknowledgments References
10 Index
List of Illustrations
1 PrefaceFigure 1 Conversion efficiencies of best research solar cells worldwide from 197...Figure 2 NREL chart of the highest confirmed conversion efficiencies for champio...
2 Chapter 1Figure 1.1 SEM images of the silicon wafers with Au particles after DHF-H2O2 cle...Figure 1.2 (a) Schematical view of the experimental setup with an Au electrode o...Figure 1.3 (a) SEM image of aligned SiNW array prepared by one-step etching in H...Figure 1.4 (a, b) Schematics of metal-assisted etching of silicon in HF-H2O2 aqu...Figure 1.5 Energy band diagrams of energy band bending induced by H2O2 concentra...Figure 1.6 (a–d) SEM images showing the morphological evolution of a silicon waf...Figure 1.7 (a) Photograph of gold-catalyzed etched b-Si samples of different cry...Figure 1.8 (a–c) Top-view and cross-sectional (insets) SEM images of nanoporous ...Figure 1.9 (a) SEM image of SiNW-based single-crystalline b-Si by silver-catalyz...Figure 1.10 (a) Process sequence for texturization of mc-Si wafers by alkaline t...Figure 1.11 (a) SEM image of a conventional acid-textured MWSS mc-Si wafer. (b) ...Figure 1.12 SEM images of the inverted pyramid structures for (a) 10 min process...
3 Chapter 2Figure 2.1 Scanning electron microscopy (SEM) photograph of a textured surface.Figure 2.2 Location of the alkaline texturing within the entire process of a typ...Figure 2.3 Sequence of steps involved in the wet etching [6].Figure 2.4 SEM photograph of the stabilization at top and vertices of a pyramid ...Figure 2.5